Humidification Solutions for Reducing CO2 Emissions at a Semiconductor Plant

About SANSHA ELECTRIC MANUFACTURING CO., LTD.

SANSHA ELECTRIC MANUFACTURING CO., LTD., which manufactures power semiconductors at its Okayama Plant, has achieved significant energy savings in its energy-intensive cleanroom processes. Consequently, the company has received the 38th “Excellence in Energy Saving Equipment Award” from the Japan Association of Refrigeration Air-conditioning Contractors.

Heat pump module chillers with Dry Fog humidification have achieved a 67% reduction in CO2 emissions.

There has been an estimated 67% reduction in CO2 emissions compared to conventional air conditioning systems in the facility where it was installed.

In terms of reducing the use of fossil fuels, such as heavy oil, the combination of heat pump module chillers and the Dry Fog humidification system has emerged as a significant success story for our company in lowering environmental impact and achieving energy savings.

The design, including the heat pumps, was arranged by SANSHA ELECTRIC.

Seeking alternatives to the use of steam boilers that consume fuel oil and require frequent maintenance.

From the perspectives of maintenance and CO2 reduction, eliminating steam was the primary condition. Over the years, we have frequently encountered several issues, including clogged and blocked water pipes leading to inefficient operations, coil replacements, and pinholes on the pipes causing steam leaks. Additionally, the use of fuel oil, a hazardous substance, further underscored our serious need for an alternative to the steam boilers.

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